Four point bending setup for characterization of semiconductor piezoresistance
نویسندگان
چکیده
منابع مشابه
Four point bending setup for characterization of semiconductor piezoresistance.
We present a four point bending setup suitable for high precision characterization of piezoresistance in semiconductors. The compact setup has a total size of 635 cm(3). Thermal stability is ensured by an aluminum housing wherein the actual four point bending fixture is located. The four point bending fixture is manufactured in polyetheretherketon and a dedicated silicon chip with embedded piez...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2008
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.2908428